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Total and angle-resolved scattering measurements have been performed in the energy range from 193 to 157 nm using the instrument described in IP-FRAUNHOFER . The back scattered light is measured by a Rayleigh-based detector ( Berthold E4 detector ) and compared to the change in laser energy after the laser interacts with the sample. The resulting change in energy allows to retrieve the emission angle and directional resolution of the scattered light.
A resolution enhancement technique termed ARS ( Angle-resolved Scattering ) has been developed at Jena. Here a second detector is used to measure the second-arrival, low-angle scattered light. Analytical and numerical calculations are performed to account for the scattered light and retrieve the emission angle and directional resolution of the scattered light.
Modeling of the total and ARS of a planar film has been performed to study properties such as the scattering radiation properties, back scattering and roughness and voids, diffuse and specular scattering in a single measurement. High-resolution ARS measurements allow to demonstrate the three-dimensional nature of the total and ARS and of the spatial variations of back scattering and extinction Tensor, diffuse and Specular scattering. Based on the experimental data a suitable model and the required parameters have been found to describe the effect of roughness and voids on total and ARS.
A resolution-enhancement technique used in optical microscopy is also employed to characterize the scattering by the “line-of-sight” of scattering samples. This improves the contrast that can be measured with the currently available ARS instrument in a single measurement. d2c66b5586
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